Please first consult the PDF documents for advice on the use of the corresponding spreadsheets. General guidance on developing an inventory can be found in the Corporate Standard.

The Semiconductor tool calculates the PFC emissions from semi-conductor wafer production. Required data include the quantities of gas that have been both consumed in wafer production and destroyed using abatement technologies, and the number of wafers produced by size.

Semi-conductor plants have other greenhouse gas sources, such as the fuels used in energy production. All sources that are typically associated with semi-conductor plants are listed below. Please note that the tools listed below are only meant as a guide; some companies may have emissions not listed and may need to see the complete listing of tools to accurately develop their GHG inventory.